Semi-automatic probe station

Probe stations are mainly used for testing in the semiconductor industry, optoelectronics industry, integrated circuits, and packaging. Widely used in the research and development of precision electrical measurement for complex and high-speed devices, aiming to ensure quality and reliability, and reduce research and development time and the cost of device manufacturing processes.

From a functional perspective, there are: temperature control probe station, vacuum probe station (ultra-low temperature probe station), RF probe station, LCD flat plate probe station, Hall effect probe station，Surface resistivityProbe station

Semi automatic technical specifications

1. The film carrier can be controlled by a motor (programmable) to achieve X-Y-Z-Theta motion in four directions, with a flatness of<± 12um;

2. Carrier XY movement range: 310 * 310mm, movement resolution: 0.5um, movement accuracy: ± 2.5um, maximum movement speed:>80mm/sec;

3. The Z-direction movement range of the load is>5mm, the movement resolution is 0.5um, the movement accuracy is ± 2um, and the repetition accuracy is ± 1um;

4. The rotation range of the stage Theta is ± 5.0 °, with a rotation resolution of 0.0001 ° and a rotation accuracy of<2.5um;

5. Support CHUCK disks suitable for 12 inch wafers, compatible with 4, 6, 8, 12 inch wafers and single DIE adsorption of 4mm x 4mm or more;